Gas Mass Flow Controllers
質量流量控制器由熱質量流量感測器、精確控制閥和基於微處理器的PC板組成，帶有信號和現場總線轉換功能。作為設定值的函數，流量控制器能夠迅速調整所需的流量。
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這些質量流量控制器的主要特點包括：
- 高準確率
- 回應速度快，重複性好
- 可選的多流體/多範圍功能
- 幾乎與壓力和溫度無關
- 緊密的設計
EL-FLOW Select 系列配備數位印刷電路板，提供高精度、出色的溫度穩定性和快速的回應。主數位印刷電路板包含測量和控制所需的所有一般功能。除了標準的 RS232 輸出外，儀器還提供模擬 I/O。
作為一個選配，可以安裝板載接口來提供 CANopen®、DeviceNet™、EtherCAT®、PROFIBUS DP、PROFINET、Modbus RTU、ASCII 或 TCP/IP、EtherNet/IP、POWERLINK 或 FLOW-BUS 協定。EL-FLOW® Select 設計具有可選擇多多氣體/多量程功能，為 (OEM-)客戶提供最佳的靈活性和工作效率。
另外也可提供其他型號/規格。
現在就與我們討論您的完整壓力反應堆系統要求。 -
Measurement / Control System
Flow range (intermediate ranges available) min. 0,16…8 mln/min
max. 0,5…25 ln/min
(based on N2)Accuracy (incl. linearity) (based on actual calibration) ± 0,5 % RD plus ±0,1%FS Repeatability < 0,2 % RD Turndown ratio up to 1:187,5 (1:50 in analog mode) Multi fluid capability storage of max. 8 calibration curves;
optional Multi Gas / Multi Range functionality up to 10 bar absSettling time (in control, typical) standard: 1…2 seconds
option: down to 500 msecControl stability < ± 0,1 % FS (typical for 1 ln/min N2) Operating temperature -10 … +70 °C Temperature sensitivity zero: < 0,05% FS/°C; span: < 0,05% Rd/°C Pressure sensitivity < 0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2 Max. Kv-value 6,6 x 10-2 Leak integrity, outboard tested < 2 x 10-9 mbar l/s He Attitude sensitivity max. error at 90° off horizontal 0,2% at 1 bar, typical N2 Warm-up time 30 min. for optimum accuracy
2 min. for accuracy ± 2% FSMechanical Parts
Material (wetted parts) Stainless steel 316L or comparable Pressure rating (PN) 64 bar abs Process connections compression type or face seal (VCR/VCO) couplings Seals standard: Viton®;
options: EPDM, Kalrez® (FFKM), FDA and USP Class VI approved compoundsWeight 0,6 kg Ingress protection IP40 Electrical Properties
Power supply +15 … 24 Vdc Max. power consumption Supply
15 V
24 Vat voltage I/O
290 mA
200 mAat current I/O
320 mA
215 mAextra for fieldbus
<75 mA
<50 mAAnalog output 0…5 (10) Vdc or 0 (4)…20 mA (sourcing output) Digital communication standard: RS232;
options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK, FLOW-BUSElectrical Connection
Analog/RS232 9-pin D-connector (male); PROFIBUS DP bus: 9-pin D-connector (female);
power: 9-pin D-connector (male);CANopen® / DeviceNet™ 5-pin M12-connector (male); FLOW-BUS/Modbus-RTU/ASCII RJ45 modular jack Modbus TCP / EtherNet/IP / POWERLINK 2 x RJ45 modular jack (in/out); EtherCAT®/ PROFINET 2 x RJ45 modular jack (in/out) -
Key features of these mass flow controllers include:
- High accuracy
- Fast response, excellent repeatability
- Optional Multi Fluid / Multi Range functionality
- Virtually pressure and temperature independent
- Compact design
The EL-FLOW Select series are equipped with a digital pc-board, offering high accuracy, excellent temperature stability and fast response. The main digital pc-board contains all of the general functions needed for measurement and control. In addition to the standard RS232 output the instruments also offer analog I/O.
As an option, an on-board interface can be mounted to provide CANopen®, DeviceNet™, EtherCAT®, PROFIBUS DP, PROFINET, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK or FLOW-BUS protocols. The EL-FLOW® Select design features optional Multi Gas / Multi Range functionality, providing (OEM-) customers with optimal flexibility and process efficiency.
Other models/specifications are also available.
Talk to us today about your complete pressure reactor system requirements.
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Measurement / Control System
Flow range (intermediate ranges available) min. 0,16…8 mln/min
max. 0,5…25 ln/min
(based on N2)Accuracy (incl. linearity) (based on actual calibration) ± 0,5 % RD plus ±0,1%FS Repeatability < 0,2 % RD Turndown ratio up to 1:187,5 (1:50 in analog mode) Multi fluid capability storage of max. 8 calibration curves;
optional Multi Gas / Multi Range functionality up to 10 bar absSettling time (in control, typical) standard: 1…2 seconds
option: down to 500 msecControl stability < ± 0,1 % FS (typical for 1 ln/min N2) Operating temperature -10 … +70 °C Temperature sensitivity zero: < 0,05% FS/°C; span: < 0,05% Rd/°C Pressure sensitivity < 0,1% Rd/bar typical N2; 0,01% Rd/bar typical H2 Max. Kv-value 6,6 x 10-2 Leak integrity, outboard tested < 2 x 10-9 mbar l/s He Attitude sensitivity max. error at 90° off horizontal 0,2% at 1 bar, typical N2 Warm-up time 30 min. for optimum accuracy
2 min. for accuracy ± 2% FSMechanical Parts
Material (wetted parts) Stainless steel 316L or comparable Pressure rating (PN) 64 bar abs Process connections compression type or face seal (VCR/VCO) couplings Seals standard: Viton®;
options: EPDM, Kalrez® (FFKM), FDA and USP Class VI approved compoundsWeight 0,6 kg Ingress protection IP40 Electrical Properties
Power supply +15 … 24 Vdc Max. power consumption Supply
15 V
24 Vat voltage I/O
290 mA
200 mAat current I/O
320 mA
215 mAextra for fieldbus
<75 mA
<50 mAAnalog output 0…5 (10) Vdc or 0 (4)…20 mA (sourcing output) Digital communication standard: RS232;
options: PROFIBUS DP, CANopen®, DeviceNet™, PROFINET, EtherCAT®, Modbus RTU, ASCII or TCP/IP, EtherNet/IP, POWERLINK, FLOW-BUSElectrical Connection
Analog/RS232 9-pin D-connector (male); PROFIBUS DP bus: 9-pin D-connector (female);
power: 9-pin D-connector (male);CANopen® / DeviceNet™ 5-pin M12-connector (male); FLOW-BUS/Modbus-RTU/ASCII RJ45 modular jack Modbus TCP / EtherNet/IP / POWERLINK 2 x RJ45 modular jack (in/out); EtherCAT®/ PROFINET 2 x RJ45 modular jack (in/out)