晶圓邊緣量測系統-可靠的投影式技術

WATOM－晶圓邊緣的半導體量測技術
KoCoS 推出的 WATOM 晶圓邊緣量測系統，為邊緣研磨與拋光製程的品質保證與製程控制樹立了全球標竿，結合最高品質標準與頂級服務水準。
其專利雷射量測技術可在晶圓整個圓周的任意位置進行邊緣輪廓量測，甚至可深入量測缺口內部的輪廓。全球領先的晶圓製造商皆採用 WATOM 作為其最先進的晶圓邊緣幾何量測設備。
晶圓邊緣量測系統-可靠的投影式技術
WATOM CCD 採用輪廓投影技術，作為 LS 雷射掃描技術的替代方案，特別適合量測需求較不嚴苛的邊緣輪廓應用，尤其適用於不需要進行缺口量測的情境。系統利用 CMOS 相機，擷取由遠心光源（Telecentric Light Source）照明後的晶圓邊緣輪廓影像，確保量測穩定性與可靠性。
WATOM 系列採模組化設計，可靈活整合至各種現代半導體製造自動化方案中，無論是人工上片或搭配自動化物料搬運系統（AMHS），皆能順利導入並運作。
 

WATOM - Semiconductor Metrology on the Edge
The wafer edge profiler WATOM from KoCoS sets the worldwide benchmark for the quality assurance and process control of edge grinding and polishing process combining the highest quality standards with top-class service.
The patent laser technology measures the edge profile not only on any point of the circumference even so inside the notch. Leading wafer manufacturer across the world use WATOM as their state-of–the art tool for geometrical measurement of wafer edge.
Wafer Edge Measurement – Reliable Projection Technology
WATOM CCD uses profile projection technology as an alternative to the LS technology and provides the ideal solution for less demanding profile measurement requirements, in particular when notch measurement is not required. A CMOS camera captures the profile image of the wafer edge illuminated by a telecentric light source.
The modular design of WATOM is prepared to be combined with various automation solutions for modern semiconductor manufacturing processes, whether individual wafers are loaded manually or an automated material handling system (AMHS) is in place.