晶圓邊緣量測系統-極高精度

WATOM - Semiconductor Metrology on the Edge
The wafer edge profiler WATOM from KoCoS sets the worldwide benchmark for the quality assurance and process control of edge grinding and polishing process combining the highest quality standards with top-class service.
The patent laser technology measures the edge profile not only on any point of the circumference even so inside the notch. Leading wafer manufacturer across the world use WATOM as their state-of–the art tool for geometrical measurement of wafer edge.
Wafer Edge Measurement - pinpoint precise
The use of smaller and smaller patterns in the semiconductor industry calls for increasingly advanced materials of extremely high quality. In response to the steady improvements in the quality of wafers, KoCoS Optical Measurement has developed WATOM, a wafer edge and notch profile measurement tool which heralds a new era of extremely precise wafer geometry measurement.
The patented measurement method of WATOM LS utilizes a lightsectioning sensor to measure the profile of the wafer edge with pinpoint precision, including the profile within the notch. Using a CMOS camera, pictures are taken of the laser line produced by the edge profile. A mathematical algorithm developed by KoCoS is then used to determine the edge profile characteristics.
The modular design of WATOM is prepared to be combined with various automation solutions for modern semiconductor manufacturing processes, whether individual wafers are loaded manually or an automated material handling system (AMHS) is in place.