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WATOM－晶圓邊緣的半導體量測技術
KoCoS 推出的 WATOM 晶圓邊緣量測系統，為邊緣研磨與拋光製程的品質保證與製程控制樹立了全球標竿，結合最高品質標準與頂級服務水準。
其專利雷射量測技術可在晶圓整個圓周的任意位置進行邊緣輪廓量測，甚至可深入量測缺口內部的輪廓。全球領先的晶圓製造商皆採用 WATOM 作為其最先進的晶圓邊緣幾何量測設備。
小巧不佔位，穩定一致的量測精度
WATOM T 是一款緊湊、經濟的替代方案，適用於無自動化需求的應用場景，同時仍能提供與其他 WATOM 系列系統相同的量測品質、製程可靠度與量測精度。
WATOM T 設計可支援兩種晶圓尺寸，方便進行快速樣品量測。
設備配備觸控螢幕，操作介面直覺易用，無論是操作人員、工程專家或維護人員皆可輕鬆上手。
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WATOM - Semiconductor Metrology on the Edge
The wafer edge profiler WATOM from KoCoS sets the worldwide benchmark for the quality assurance and process control of edge grinding and polishing process combining the highest quality standards with top-class service.
The patent laser technology measures the edge profile not only on any point of the circumference even so inside the notch. Leading wafer manufacturer across the world use WATOM as their state-of–the art tool for geometrical measurement of wafer edge.
Small footprint and consistent accuracy
WATOM T is a compact, inexpensive alternative for applications that have no automation requirements and provides the same quality, process reliability and measurement precision as other WATOM systems.
WATOM T is designed to accept two wafer sizes for quick sample measurement.
Equipped with a touch screen, this tool is easy to use for operators, experts and maintenance staff alike.
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